PhD Thesis: New Routes to Inorganic Materials: Single-Source Precursors for Semiconductors
Department of Chemistry, The University of Manchester 2008
Abstract:
The work herein describes the synthesis and characterization of single source precursors (SSPs) and the results of deposition experiment using these precursors to grow metal selenide thin films by chemical vapor deposition (CVD).
The first part of the thesis reports the facile and reproducible methods for the syntheses of diseleno and thioselenophosphinate ligands and complexes. Several novel ligands including (iPr2PSe)2Se, (iPr2PSe)2Se2, (Ph2PSe)2Se, (HNEt3)(iPr2PSe2), (HNEt3)(Ph2PSe2), (HNEt3)(tBu2PSe2), (HNEt3)(iPr2PSSe) and their metal complexes have been synthesized with high yield and purity. All compounds have been characterized by nuclear magnetic resonance (NMR), mass spectroscopy (MS) and elemental analysis. Most compounds have been structurally characterized by single crystal X-ray crystallography.
In part two of the thesis, these newly developed single source precursors have been used for deposition thin films of CdSe, PbSe, Cu2-xSe, In2Se3, and CuInSe2 by aerosol-assisted chemical vapor deposition (AACVD). The thin films have been analyzed by X-ray powder diffraction (XRD), scanning electron microscopy (SEM) and energy dispersive analysis of Xrays (EDAX)